All the fabrication features of these microactuators are compatible with standard microelectronic fabrication processes that are available for a variety of MEMS applications. These include both single actuators and actuator arrays for active micro electro-mechanical fluid control systems. One group of applications involves "microflap" arrays for aircraft control surfaces and drag reducing surfaces. Studies are underway to combine such fluid control systems with micromachined arrays of surface shear stress sensors to yield a complete air control system in delta wing aircraft. Other opto-mechanical applications include the use of arrays of individually controlled actuators with reflective surfaces for laser beam or optical array control in display, communication and information storage devices.

The relatively low manufacturing cost of these magnetic microactuators and their improved mechanical performance, compared to analogous electrostatically driven microactuators, will enable them to be utilized in a wide variety of individual and array applications.

Reference: UCLA Case No. 1995-566

US Patent Number: 5,629,918