| UCLA Technology Available For Licensing |
The invention allows fabrication, for the first time, of amorphous ferroelectric thin films on a variety of substrates that are suitable for all known metal oxide-based ferroelectric materials for both research and application purposes. This technology provides a technique for forming such films in processes at relatively low temperatures in comparison to those of other techniques. This will allow the manufacturer much greater freedom in the selection of materials compatible with processing of the ferroelectric materials for various device applications.
| Reference: UCLA Case No. 1990-565 | US Patent Number: 5,342,648 |
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