BACKGROUND:  One-dimensional nanostructures such as semiconductor nanowires and carbon nanotube arrays have been shown to possess exciting electrical, optical, and mechanical properties. While many of these nanostructures have been made into discrete prototype devices, volume manufacturing is not yet feasible.

INNOVATION:  Researchers at UCLA have developed a method to form aligned nanowires (and/or nanotube arrays) through standard lithographic patterning techniques. The invention enables control over the nanowire (or nanotube) number, linewidth, and pitch, with no restriction on the substrate size and the material choice of nanowires (or nanotubes). Furthermore, since the technique requires a low-thermal budget, integration and fabrication of heterogeneous devices is feasible with minimal cross-contamination issues.

POTENTIAL APPLICATIONS 

• Nanowire-based devices
• Integration with conventional IC manufacturing platform for high performance digital, analog, RF, communication, and sensing products

ADVANTAGES

• Compatible with existing wafer-scale integrated circuit manufacturing infrastructure
• Compatible with plastic, semiconductor, or metal substrates
• Controllable alignment and pitch

Reference: UCLA Case No. 2009-650